Rapid and low power laser actuation of sputter-deposited NiTi shape memory alloy (SMA) MEMS thermal bimorph actuators

出版年份 2019 全文链接

标题

作者

关键词

Thin film, Shape memory alloy (SMA), Thermal actuators, MEMS, Residual stress, Fast optical actuation, Low power thermal actuators, Phase change actuators

出版物

SENSORS AND ACTUATORS A-PHYSICAL

Volume -, Issue -, Pages -

出版商

Elsevier BV

发表日期

2019-03-29

DOI

10.1016/j.sna.2019.03.016

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