Annealing effect of surface-activated bonded diamond/Si interface

Published 2019 View Full Article

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Title
Annealing effect of surface-activated bonded diamond/Si interface
Authors
Keywords
Direct bonding of diamond and Si, Bonding interface, Residual stress, Surface activated bonding, Interfacial structure
Journal
DIAMOND AND RELATED MATERIALS
Volume 93, Issue -, Pages 187-192
Publisher
Elsevier BV
Online
2019-02-14
DOI
10.1016/j.diamond.2019.02.015

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