Annealing effect of surface-activated bonded diamond/Si interface

标题
Annealing effect of surface-activated bonded diamond/Si interface
作者
关键词
Direct bonding of diamond and Si, Bonding interface, Residual stress, Surface activated bonding, Interfacial structure
出版物
DIAMOND AND RELATED MATERIALS
Volume 93, Issue -, Pages 187-192
出版商
Elsevier BV
发表日期
2019-02-14
DOI
10.1016/j.diamond.2019.02.015

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