The relationship between the Young’s modulus and dry etching rate of polydimethylsiloxane (PDMS)

SU8 etch mask for patterning PDMS and its application to flexible fluidic microactuators

(2016) Benjamin Gorissen et al.   Microsystems & Nanoengineering

Retina-on-a-chip: a microfluidic platform for point access signaling studies

(2015) Kirsten H. Dodson et al.   BIOMEDICAL MICRODEVICES

Effect of varying mixing ratio of PDMS on the consistency of the soft-contact Stribeck curve for glycerol solutions

(2015) Jung Min Kim et al.   TRIBOLOGY INTERNATIONAL

Mechanical characterization of bulk Sylgard 184 for microfluidics and microengineering

(2014) I D Johnston et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Plasma Etching of Poly(dimethylsiloxane): Roughness Formation, Mechanism, Control, and Application in the Fabrication of Microfluidic Structures

(2012) Maria-Elena Vlachopoulou et al.   Plasma Processes and Polymers

Photolithographic surface micromachining of polydimethylsiloxane (PDMS)

(2011) Weiqiang Chen et al.   LAB ON A CHIP

Dry etching of polydimethylsiloxane using microwave plasma

(2009) Sung Jin Hwang et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Plastic masters—rigid templates for soft lithography

(2009) Salil P. Desai et al.   LAB ON A CHIP

Thick single-layer positive photoresist mold and poly(dimethylsiloxane) (PDMS) dry etching for the fabrication of a glass–PDMS–glass microfluidic device

(2008) S R Oh   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Fluorine-Based Plasma Treatment of Biocompatible Silicone Elastomer: The Effect of Temperature on Etch Rate and Surface Properties

(2007) Dariusz Szmigiel et al.   Plasma Processes and Polymers