Dry etching of polydimethylsiloxane using microwave plasma

Title
Dry etching of polydimethylsiloxane using microwave plasma
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 19, Issue 9, Pages 095010
Publisher
IOP Publishing
Online
2009-08-25
DOI
10.1088/0960-1317/19/9/095010

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