Suppressing the Initial Growth of Sidewall GaN by Modifying Micron-Sized Patterned Sapphire Substrate with H3PO4-Based Etchant
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Title
Suppressing the Initial Growth of Sidewall GaN by Modifying Micron-Sized Patterned Sapphire Substrate with H3PO4-Based Etchant
Authors
Keywords
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Journal
Micromachines
Volume 9, Issue 12, Pages 622
Publisher
MDPI AG
Online
2018-11-27
DOI
10.3390/mi9120622
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Related references
Note: Only part of the references are listed.- Comparative study of GaN-based ultraviolet LEDs grown on different-sized patterned sapphire substrates with sputtered AlN nucleation layer
- (2017) Shengjun Zhou et al. JAPANESE JOURNAL OF APPLIED PHYSICS
- AFM and SEM Study on Crystallographic and Topographical Evolutions of Wet-Etched Patterned Sapphire Substrate (PSS): Part II. Cone-Shaped PSS Etched in H 2 SO 4 and H 3 PO 4 Mixture with Varying Volume Ratio at 230°C
- (2017) Jian Shen et al. ECS Journal of Solid State Science and Technology
- Effect of Sputtered AlN Location on the Growth Mechanism of GaN
- (2017) Pei-Yu Wu et al. ECS Journal of Solid State Science and Technology
- AFM and SEM Study on Crystallographic and Topographical Evolutions of Wet-Etched Patterned Sapphire Substrate (PSS): Part III. Cone-Shaped PSS Etched in H 2 SO 4 and H 3 PO 4 Mixture at Various Temperatures
- (2017) Jian Shen et al. ECS Journal of Solid State Science and Technology
- Effects of GaN/AlGaN/Sputtered AlN nucleation layers on performance of GaN-based ultraviolet light-emitting diodes
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- AFM and SEM Study on Crystallographic and Topographical Evolution of Wet-Etched Patterned Sapphire Substrates (PSS)
- (2016) Jian Shen et al. ECS Journal of Solid State Science and Technology
- Nanoscale Epitaxial Lateral Overgrowth of GaN-Based Light-Emitting Diodes on an AlN Nanorod-Array Template
- (2015) Chen-Hung Tsai et al. IEEE JOURNAL OF QUANTUM ELECTRONICS
- Analysis of the Gas Phase Kinetics Active during GaN Deposition from NH3 and Ga(CH3)3
- (2015) Stefano Ravasio et al. JOURNAL OF PHYSICAL CHEMISTRY A
- Spatial Correlation Between Efficiency and Crystal Structure in GaN-Based Light-Emitting Diodes Prepared on High-Aspect Ratio Patterned Sapphire Substrate With Sputtered AlN Nucleation Layer
- (2014) IEEE TRANSACTIONS ON ELECTRON DEVICES
- Performance of InGaN Light-Emitting Diodes Fabricated on Patterned Sapphire Substrates with Modified Top-Tip Cone Shapes
- (2014) Hsu-Hung Hsueh et al. INTERNATIONAL JOURNAL OF PHOTOENERGY
- GaN-Based Ultraviolet Light Emitting Diodes With Ex Situ Sputtered AlN Nucleation Layer
- (2013) W. C. Lai et al. Journal of Display Technology
- Evolution of Bottomc-Plane on Wet-Etched Patterned Sapphire Substrate
- (2013) Chien-Chih Chen et al. ECS Journal of Solid State Science and Technology
- The Formation and the Plane Indices of Etched Facets of Wet Etching Patterned Sapphire Substrate
- (2012) Yu-Chung Chen et al. JOURNAL OF THE ELECTROCHEMICAL SOCIETY
- Investigation of GaN Films Grown on Liquid-Phase Deposited SiO2Nanopatterned Sapphire Substrates
- (2012) Cheng-Yu Hsieh et al. ECS Journal of Solid State Science and Technology
- Light Output Enhancement of InGaN Light-Emitting Diodes Grown on Masklessly Etched Sapphire Substrates
- (2008) Hung-Cheng Lin et al. IEEE PHOTONICS TECHNOLOGY LETTERS
- Stress Reduction and Enhanced Extraction Efficiency of GaN-Based LED Grown on Cone-Shape-Patterned Sapphire
- (2008) Jae-Hoon Lee et al. IEEE PHOTONICS TECHNOLOGY LETTERS
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