UV-curable nanoimprint resist with liquid volume-expanding monomers

Published 2018 View Full Article

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Title
UV-curable nanoimprint resist with liquid volume-expanding monomers
Authors
Keywords
Nanoimprint, Resist, UV-curable, Adhesion, Surface patterning
Journal
MICROELECTRONIC ENGINEERING
Volume 205, Issue -, Pages 32-36
Publisher
Elsevier BV
Online
2018-11-17
DOI
10.1016/j.mee.2018.10.011

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