UV-curable nanoimprint resist with liquid volume-expanding monomers

标题
UV-curable nanoimprint resist with liquid volume-expanding monomers
作者
关键词
Nanoimprint, Resist, UV-curable, Adhesion, Surface patterning
出版物
MICROELECTRONIC ENGINEERING
Volume 205, Issue -, Pages 32-36
出版商
Elsevier BV
发表日期
2018-11-17
DOI
10.1016/j.mee.2018.10.011

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