Deposition of ZrON thin films by reactive magnetron sputtering using a hollow cylindrical target

Published 2018 View Full Article

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Title
Deposition of ZrON thin films by reactive magnetron sputtering using a hollow cylindrical target
Authors
Keywords
-
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 36, Issue 6, Pages 061509
Publisher
American Vacuum Society
Online
2018-10-12
DOI
10.1116/1.5042439

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