Deposition of ZrON thin films by reactive magnetron sputtering using a hollow cylindrical target

标题
Deposition of ZrON thin films by reactive magnetron sputtering using a hollow cylindrical target
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 36, Issue 6, Pages 061509
出版商
American Vacuum Society
发表日期
2018-10-12
DOI
10.1116/1.5042439

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