Annealing and Impurity Effects in Co Thin Films for MOL Contact and BEOL Metallization

Title
Annealing and Impurity Effects in Co Thin Films for MOL Contact and BEOL Metallization
Authors
Keywords
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Journal
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 166, Issue 1, Pages D3100-D3109
Publisher
The Electrochemical Society
Online
2018-11-09
DOI
10.1149/2.0151901jes

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