Structural and Electrical Characterization of SiO2 Gate Dielectrics Deposited from Solutions at Moderate Temperatures in Air

Published 2016 View Full Article

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Title
Structural and Electrical Characterization of SiO2 Gate Dielectrics Deposited from Solutions at Moderate Temperatures in Air
Authors
Keywords
-
Journal
ACS Applied Materials & Interfaces
Volume 9, Issue 1, Pages 529-536
Publisher
American Chemical Society (ACS)
Online
2016-12-09
DOI
10.1021/acsami.6b11214

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