Effect of dust particle size on the plasma characteristics in a radio frequency capacitively coupled silane plasma

Published 2018 View Full Article

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Title
Effect of dust particle size on the plasma characteristics in a radio frequency capacitively coupled silane plasma
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 52, Issue 1, Pages 015206
Publisher
IOP Publishing
Online
2018-10-03
DOI
10.1088/1361-6463/aae5cf

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