Effect of dust particle size on the plasma characteristics in a radio frequency capacitively coupled silane plasma

标题
Effect of dust particle size on the plasma characteristics in a radio frequency capacitively coupled silane plasma
作者
关键词
-
出版物
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 52, Issue 1, Pages 015206
出版商
IOP Publishing
发表日期
2018-10-03
DOI
10.1088/1361-6463/aae5cf

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