Modifications of surface and bulk properties of magnetron-sputtered carbon films employing a post-treatment of atmospheric pressure plasma

Title
Modifications of surface and bulk properties of magnetron-sputtered carbon films employing a post-treatment of atmospheric pressure plasma
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 58, Issue SA, Pages SAAC07
Publisher
Japan Society of Applied Physics
Online
2019-01-08
DOI
10.7567/1347-4065/aaec87

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