Modifications of surface and bulk properties of magnetron-sputtered carbon films employing a post-treatment of atmospheric pressure plasma

标题
Modifications of surface and bulk properties of magnetron-sputtered carbon films employing a post-treatment of atmospheric pressure plasma
作者
关键词
-
出版物
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 58, Issue SA, Pages SAAC07
出版商
Japan Society of Applied Physics
发表日期
2019-01-08
DOI
10.7567/1347-4065/aaec87

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