From the Bottom-Up: Toward Area-Selective Atomic Layer Deposition with High Selectivity

出版年份 2018 全文链接

标题

From the Bottom-Up: Toward Area-Selective Atomic Layer Deposition with High Selectivity

作者

关键词

-

出版物

CHEMISTRY OF MATERIALS

Volume 31, Issue 1, Pages 2-12

出版商

American Chemical Society (ACS)

发表日期

2018-12-19

DOI

10.1021/acs.chemmater.8b03454

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