Thermoresistance of p -Type 4H-SiC Integrated MEMS Devices for High-Temperature Sensing
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Title
Thermoresistance of p
-Type 4H-SiC Integrated MEMS Devices for High-Temperature Sensing
Authors
Keywords
-
Journal
ADVANCED ENGINEERING MATERIALS
Volume -, Issue -, Pages 1801049
Publisher
Wiley
Online
2019-01-02
DOI
10.1002/adem.201801049
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