Growth of crystalline Al2O3 via thermal atomic layer deposition: Nanomaterial phase stabilization

Title
Growth of crystalline Al2O3 via thermal atomic layer deposition: Nanomaterial phase stabilization
Authors
Keywords
-
Journal
APL Materials
Volume 2, Issue 3, Pages 032105
Publisher
AIP Publishing
Online
2014-03-13
DOI
10.1063/1.4868300

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