High resolution UV roll-to-roll nanoimprinting of resin moulds and subsequent replication via thermal nanoimprint lithography

Published 2012 View Full Article

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Title
High resolution UV roll-to-roll nanoimprinting of resin moulds and subsequent replication via thermal nanoimprint lithography
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 23, Issue 48, Pages 485310
Publisher
IOP Publishing
Online
2012-11-09
DOI
10.1088/0957-4484/23/48/485310

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