Enhancement of antireflection property of silicon using nanostructured surface combined with a polymer deposition

Title
Enhancement of antireflection property of silicon using nanostructured surface combined with a polymer deposition
Authors
Keywords
Silicon nanostructure, Antireflection, Hydrogen etching, Silicon-based polymer
Journal
Nanoscale Research Letters
Volume 9, Issue 1, Pages 9
Publisher
Springer Nature
Online
2014-01-08
DOI
10.1186/1556-276x-9-9

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