Highly organised and dense vertical silicon nanowire arrays grown in porous alumina template on silicon wafers

Published 2013 View Full Article

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Title
Highly organised and dense vertical silicon nanowire arrays grown in porous alumina template on silicon wafers
Authors
Keywords
Anodic alumina oxide, Nanoimprint lithography, Templates, Chemical vapour deposition, Nanowires, Silicon, Hexagonal array, Defect-free
Journal
Nanoscale Research Letters
Volume 8, Issue 1, Pages 287
Publisher
Springer Nature
Online
2013-06-17
DOI
10.1186/1556-276x-8-287

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