Fabrication of uniform 4H-SiC mesopores by pulsed electrochemical etching

Published 2014 View Full Article

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Title
Fabrication of uniform 4H-SiC mesopores by pulsed electrochemical etching
Authors
Keywords
Constant pulsed current, Uniform mesopores, Cycle time, Pause time
Journal
Nanoscale Research Letters
Volume 9, Issue 1, Pages 570
Publisher
Springer Nature
Online
2014-10-13
DOI
10.1186/1556-276x-9-570
References
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