Fabrication of uniform 4H-SiC mesopores by pulsed electrochemical etching

In this letter, the uniform 4H silicon carbide (SiC) mesopores was fabricated by pulsed electrochemical etching method. The length of the mesopores is about 19 nm with a diameter of about 19 nm. The introduction of pause time (T-off) is crucial to form the uniform 4H-SiC mesopores. The pore diameter will not change if etching goes with T-off. The hole concentration decreasing at the pore tips during the T-off is the main reason for uniformity.