Atomic layer deposition of high-density Pt nanodots on Al2O3 film using (MeCp)Pt(Me)3 and O2 precursors for nonvolatile memory applications

标题
Atomic layer deposition of high-density Pt nanodots on Al2O3 film using (MeCp)Pt(Me)3 and O2 precursors for nonvolatile memory applications
作者
关键词
Atomic layer deposition, Pt nanodots, Nonvolatile memory
出版物
Nanoscale Research Letters
Volume 8, Issue 1, Pages 80
出版商
Springer Nature
发表日期
2013-02-15
DOI
10.1186/1556-276x-8-80

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