Fabrication, characterization and simulation of Ω-gate twin poly-Si FinFET nonvolatile memory

Published 2013 View Full Article

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Title
Fabrication, characterization and simulation of Ω-gate twin poly-Si FinFET nonvolatile memory
Authors
Keywords
Twin poly-Si, FinFET, TFT, Nonvolatile memory, Ω-gate, Nanowires, Three-dimensional, Flash memory
Journal
Nanoscale Research Letters
Volume 8, Issue 1, Pages 331
Publisher
Springer Nature
Online
2013-07-23
DOI
10.1186/1556-276x-8-331
References
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