Fabrication, characterization and simulation of Ω-gate twin poly-Si FinFET nonvolatile memory

标题
Fabrication, characterization and simulation of Ω-gate twin poly-Si FinFET nonvolatile memory
作者
关键词
Twin poly-Si, FinFET, TFT, Nonvolatile memory, Ω-gate, Nanowires, Three-dimensional, Flash memory
出版物
Nanoscale Research Letters
Volume 8, Issue 1, Pages 331
出版商
Springer Nature
发表日期
2013-07-23
DOI
10.1186/1556-276x-8-331

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