Crystallization of amorphous silicon thin films deposited by PECVD on nickel-metalized porous silicon

Published 2012 View Full Article

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Title
Crystallization of amorphous silicon thin films deposited by PECVD on nickel-metalized porous silicon
Authors
Keywords
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Journal
Nanoscale Research Letters
Volume 7, Issue 1, Pages 464
Publisher
Springer Nature
Online
2012-08-17
DOI
10.1186/1556-276x-7-464

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