Crystallization of amorphous silicon thin films deposited by PECVD on nickel-metalized porous silicon

标题
Crystallization of amorphous silicon thin films deposited by PECVD on nickel-metalized porous silicon
作者
关键词
-
出版物
Nanoscale Research Letters
Volume 7, Issue 1, Pages 464
出版商
Springer Nature
发表日期
2012-08-17
DOI
10.1186/1556-276x-7-464

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