Quantized structuring of transparent films with femtosecond laser interference

Femtosecond laser direct hard mask writing for selective facile micron-scale inverted-pyramid patterning of silicon

(2012) K. Kumar et al.   APPLIED PHYSICS LETTERS

Modeling validity of femtosecond laser breakdown in wide bandgap dielectrics

(2012) Xufeng Jing et al.   APPLIED SURFACE SCIENCE

Proof of damage-free selective removal of thin dielectric coatings on silicon wafers by irradiation with femtosecond laser pulses

(2012) Tino Rublack et al.   JOURNAL OF APPLIED PHYSICS

Selective ablation of thin SiO2 layers on silicon substrates by femto- and picosecond laser pulses

(2011) T. Rublack et al.   APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

Femtosecond laser delamination of thin transparent layers from semiconducting substrates [Invited]

(2011) Tino Rublack et al.   Optical Materials Express

Mechanics analysis of femtosecond laser-induced blisters produced in thermally grown oxide on Si(100)

(2010) Joel P. McDonald et al.   JOURNAL OF MATERIALS RESEARCH

Femtosecond laser micromachining in transparent materials

(2008) Rafael R. Gattass et al.   Nature Photonics