Proof of damage-free selective removal of thin dielectric coatings on silicon wafers by irradiation with femtosecond laser pulses

Selective ablation of thin SiO2 layers on silicon substrates by femto- and picosecond laser pulses

(2011) T. Rublack et al.   APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

Femtosecond laser delamination of thin transparent layers from semiconducting substrates [Invited]

(2011) Tino Rublack et al.   Optical Materials Express

Light induced solid-phase crystallization of Si nanolayers in Si/SiO2 multiple quantum wells

(2010) T. Mchedlidze et al.   JOURNAL OF APPLIED PHYSICS

A comprehensive model for the ultrashort visible light irradiation of semiconductors

(2010) N. Medvedev et al.   JOURNAL OF APPLIED PHYSICS

High-resolution investigations of ripple structures formed by femtosecond laser irradiation of silicon

(2009) M. Schade et al.   ANALYTICAL AND BIOANALYTICAL CHEMISTRY

Picosecond laser ablation of SiO2 layers on silicon substrates

(2009) Sonja Hermann et al.   APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING