Fabrication of 3D ZnO hollow shell structures by prism holographic lithography and atomic layer deposition
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Title
Fabrication of 3D ZnO hollow shell structures by prism holographic lithography and atomic layer deposition
Authors
Keywords
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Journal
Journal of Materials Chemistry C
Volume 2, Issue 11, Pages 1957-1961
Publisher
Royal Society of Chemistry (RSC)
Online
2014-01-06
DOI
10.1039/c3tc32366h
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