Fabrication of 3D ZnO hollow shell structures by prism holographic lithography and atomic layer deposition

Title
Fabrication of 3D ZnO hollow shell structures by prism holographic lithography and atomic layer deposition
Authors
Keywords
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Journal
Journal of Materials Chemistry C
Volume 2, Issue 11, Pages 1957-1961
Publisher
Royal Society of Chemistry (RSC)
Online
2014-01-06
DOI
10.1039/c3tc32366h

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