Fabrication of Inverted-Pyramid Silicon Nanopore Arrays with Three-Step Wet Etching
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Title
Fabrication of Inverted-Pyramid Silicon Nanopore Arrays with Three-Step Wet Etching
Authors
Keywords
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Journal
ECS Journal of Solid State Science and Technology
Volume 2, Issue 11, Pages P419-P422
Publisher
The Electrochemical Society
Online
2013-08-08
DOI
10.1149/2.005311jss
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