Fabrication of Inverted-Pyramid Silicon Nanopore Arrays with Three-Step Wet Etching

Title
Fabrication of Inverted-Pyramid Silicon Nanopore Arrays with Three-Step Wet Etching
Authors
Keywords
-
Journal
ECS Journal of Solid State Science and Technology
Volume 2, Issue 11, Pages P419-P422
Publisher
The Electrochemical Society
Online
2013-08-08
DOI
10.1149/2.005311jss

Ask authors/readers for more resources

Find Funding. Review Successful Grants.

Explore over 25,000 new funding opportunities and over 6,000,000 successful grants.

Explore

Publish scientific posters with Peeref

Peeref publishes scientific posters from all research disciplines. Our Diamond Open Access policy means free access to content and no publication fees for authors.

Learn More