Nanopore fabrication in amorphous Si: Viscous flow model and comparison to experiment

Published 2010 View Full Article

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Title
Nanopore fabrication in amorphous Si: Viscous flow model and comparison to experiment
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 108, Issue 1, Pages 014310
Publisher
AIP Publishing
Online
2010-07-08
DOI
10.1063/1.3452390

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