Effect of Crystal Structure and Grain Size on Photo-Catalytic Activities of Remote-Plasma Atomic Layer Deposited Titanium Oxide Thin Film

Title
Effect of Crystal Structure and Grain Size on Photo-Catalytic Activities of Remote-Plasma Atomic Layer Deposited Titanium Oxide Thin Film
Authors
Keywords
-
Journal
Publisher
The Electrochemical Society
Online
2012-08-25
DOI
10.1149/2.001204jss

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