Low-Stress Silicon Nitride Platform for Mid-Infrared Broadband and Monolithically Integrated Microphotonics

Title
Low-Stress Silicon Nitride Platform for Mid-Infrared Broadband and Monolithically Integrated Microphotonics
Authors
Keywords
-
Journal
Advanced Optical Materials
Volume 1, Issue 10, Pages 732-739
Publisher
Wiley
Online
2013-07-17
DOI
10.1002/adom.201300205

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