Low-Stress Silicon Nitride Platform for Mid-Infrared Broadband and Monolithically Integrated Microphotonics
出版年份 2013 全文链接
标题
Low-Stress Silicon Nitride Platform for Mid-Infrared Broadband and Monolithically Integrated Microphotonics
作者
关键词
-
出版物
Advanced Optical Materials
Volume 1, Issue 10, Pages 732-739
出版商
Wiley
发表日期
2013-07-17
DOI
10.1002/adom.201300205
参考文献
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