Fabrication of polyimide sacrificial layers with inclined sidewalls based on reactive ion etching

Title
Fabrication of polyimide sacrificial layers with inclined sidewalls based on reactive ion etching
Authors
Keywords
-
Journal
AIP Advances
Volume 4, Issue 3, Pages 031328
Publisher
AIP Publishing
Online
2014-03-12
DOI
10.1063/1.4868379

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