~3-nm ZnO Nanoislands Deposition and Application in Charge Trapping Memory Grown by Single ALD Step
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Title
~3-nm ZnO Nanoislands Deposition and Application in Charge Trapping Memory Grown by Single ALD Step
Authors
Keywords
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Journal
Scientific Reports
Volume 6, Issue 1, Pages -
Publisher
Springer Nature
Online
2016-12-19
DOI
10.1038/srep38712
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