~3-nm ZnO Nanoislands Deposition and Application in Charge Trapping Memory Grown by Single ALD Step

Title
~3-nm ZnO Nanoislands Deposition and Application in Charge Trapping Memory Grown by Single ALD Step
Authors
Keywords
-
Journal
Scientific Reports
Volume 6, Issue 1, Pages -
Publisher
Springer Nature
Online
2016-12-19
DOI
10.1038/srep38712

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