Surface plasmon assisted contact scheme nanoscale photolithography using an UV lamp

Title
Surface plasmon assisted contact scheme nanoscale photolithography using an UV lamp
Authors
Keywords
-
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 26, Issue 1, Pages 227
Publisher
American Vacuum Society
Online
2008-02-16
DOI
10.1116/1.2834688

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