Effects of cumulative ion bombardment on ITO films deposited on PET and Si substrates by DC magnetron sputtering

Title
Effects of cumulative ion bombardment on ITO films deposited on PET and Si substrates by DC magnetron sputtering
Authors
Keywords
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Journal
Optical Materials Express
Volume 4, Issue 4, Pages 764
Publisher
The Optical Society
Online
2014-03-22
DOI
10.1364/ome.4.000764

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