Effects of cumulative ion bombardment on ITO films deposited on PET and Si substrates by DC magnetron sputtering

标题
Effects of cumulative ion bombardment on ITO films deposited on PET and Si substrates by DC magnetron sputtering
作者
关键词
-
出版物
Optical Materials Express
Volume 4, Issue 4, Pages 764
出版商
The Optical Society
发表日期
2014-03-22
DOI
10.1364/ome.4.000764

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