AlGaN/GaN MISHEMTs with AlN gate dielectric grown by thermal ALD technique

Title
AlGaN/GaN MISHEMTs with AlN gate dielectric grown by thermal ALD technique
Authors
Keywords
AlGaN/GaN HEMT, 2DEG, ALD, MISHEMT
Journal
Nanoscale Research Letters
Volume 10, Issue 1, Pages -
Publisher
Springer Nature
Online
2015-03-03
DOI
10.1186/s11671-015-0802-x

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