Structural, Electrical and Dielectric Properties of Sputtered TiO2 Films for Al/TiO2/Si Capacitors

Published 2013 View Full Article

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Title
Structural, Electrical and Dielectric Properties of Sputtered TiO2 Films for Al/TiO2/Si Capacitors
Authors
Keywords
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Journal
Science of Advanced Materials
Volume 5, Issue 4, Pages 398-405
Publisher
American Scientific Publishers
Online
2013-05-02
DOI
10.1166/sam.2013.1470

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