Selective p-type Doping of GaN:Si by Mg Ion Implantation and Multicycle Rapid Thermal Annealing

Published 2015 View Full Article

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Title
Selective p-type Doping of GaN:Si by Mg Ion Implantation and Multicycle Rapid Thermal Annealing
Authors
Keywords
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Journal
ECS Journal of Solid State Science and Technology
Volume 5, Issue 2, Pages P124-P127
Publisher
The Electrochemical Society
Online
2015-12-12
DOI
10.1149/2.0371602jss

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