Gas discharge devices generating the directed fluxes of off-electrode plasma

Published 2013 View Full Article

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Title
Gas discharge devices generating the directed fluxes of off-electrode plasma
Authors
Keywords
-
Journal
VACUUM
Volume 101, Issue -, Pages 291-297
Publisher
Elsevier BV
Online
2013-10-10
DOI
10.1016/j.vacuum.2013.09.014

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