Gas discharge devices generating the directed fluxes of off-electrode plasma

标题
Gas discharge devices generating the directed fluxes of off-electrode plasma
作者
关键词
-
出版物
VACUUM
Volume 101, Issue -, Pages 291-297
出版商
Elsevier BV
发表日期
2013-10-10
DOI
10.1016/j.vacuum.2013.09.014

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