Low temperature deposition of SiOx insulator film with newly developed facing electrodes chemical vapor deposition

Published 2013 View Full Article

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Title
Low temperature deposition of SiOx insulator film with newly developed facing electrodes chemical vapor deposition
Authors
Keywords
-
Journal
VACUUM
Volume 101, Issue -, Pages 189-192
Publisher
Elsevier BV
Online
2013-09-02
DOI
10.1016/j.vacuum.2013.08.003

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