Effects of substrate temperature on structure and mechanical properties of sputter deposited fluorocarbon thin films

Published 2012 View Full Article

  1. Home
  2. Publications
  3. Publication Search
  4. Publication Details
Title
Effects of substrate temperature on structure and mechanical properties of sputter deposited fluorocarbon thin films
Authors
Keywords
-
Journal
VACUUM
Volume 87, Issue -, Pages 218-221
Publisher
Elsevier BV
Online
2012-06-01
DOI
10.1016/j.vacuum.2012.05.029

Ask authors/readers for more resources

Protocol

Community support

Reagent

Community support

Reprint

Contact the author

Add your recorded webinar

Do you already have a recorded webinar? Grow your audience and get more views by easily listing your recording on Peeref.

Upload Now

Become a Peeref-certified reviewer

The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.

Get Started
Webinars Posters Questions Hubs Funding Journals Articles Connect Collections Reviewers About Us FAQs Mobile App Privacy Policy Terms of Use
© Peeref 2019-2024. All rights reserved.