4.6 Article Proceedings Paper

Effect of microwave power and nitrogen addition on the formation of {100} faceted diamond from microcrystalline to nanocrystalline

Journal

VACUUM
Volume 85, Issue 12, Pages 1130-1134

Publisher

PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.vacuum.2011.01.024

Keywords

Nanocrystalline diamond; {100} facet; Nitrogen addition; Microwave power; MPCVD

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In this work, we report {100} multi-faceted diamond from large grained micro- to nano-crystalline obtained by microwave plasma chemical vapor deposition (MPCVD). The diamond samples were grown using different microwave power 2000 and 3200 W with a small amount of nitrogen and oxygen addition into conventional methane and hydrogen plasma in a 5 kW MPCVD reactor. Scanning electron microscopy (SEM), micro-Raman spectroscopy and X-ray diffraction (XRD) were used to characterize the morphology, crystalline quality and orientation or texture of the diamond samples. SEM micrographs clearly evidence various diamonds of distinct morphologies consisting of smooth square {100} facets from micrometer or nanometer size. Especially novel morphology, large {100} faceted nanocrystalline diamond balls of high growth rate 17.0 mu m/h were obtained. The effect of microwave power and temperature and the role of nitrogen addition on diamond growth rate and the formation of different types of {100} faceted diamond from micro- to nanocrystalline is discussed. These results shed light into the specific growth mechanism of CVD diamond upon nitrogen perturbation. (C) 2011 Elsevier Ltd. All rights reserved.

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